Pixel size at maximum magnification
<0.3um(CMOS), <0.5um(CCD), <1.2um(FP)
True low-contrast 3D resolution
2 um
Maximum scanning diameter
100 mm
Maximum scanning length
130 mm
Maximum physical object length
200 mm
Size / weight
1200W x 640D x 520H / 225 kg
Shielded feedthrough for user's cables/pipes
yes
Power & control signals for optional in-situ stages
yes
Integrated micro-positioning stage
yes
Active artefact suppression
yes